特大型硅晶生长用坩埚的工业试验研制

RESEARCH AND MANUFACTURE OF EXTRA LARGE CRUCIBLE FOR GROWING CRYSTAL SILICON

特大型硅晶坩埚是电磁感应硅晶冶炼领域的前沿技术产品,受工业设备及技术条件的制约,其研发试制难度极大。本文采用常规振动成型等工业设备试制了Φ1400/Φ1160mm×2300mm特大型硅晶坩埚,从关键设备的合理改造、原材料的精选、生产流程及工艺技术、参数优化等方面加以科学控制,对特大型硅晶坩埚的试验研制进行了探索,成功研制出符合客户使用质量性能要求的坩埚,并就其质量特性进行了初步的分析和讨论。

Large silicon crystal crucible is a key equipment widely used for making crystal silicon under electromagnetic induction conditions, but right now it is difficult to make extra large crucible using the current industrial equipments and techniques. After some trial-and-error experiments, a method is successfully developed for making extra large crucible with a size of Φ1 400/Φ1 160 mm×2 300 mm by making use of normal industrial facilities such as vibration model equipment, in which a number of parameters have been addressed, including modifying key equipments, selecting starting materials and optimizing the process. Following the newly developed process, some extra large silicon crystal crucibles have been successfully made and delivered to customers, of which the quality characteristics are analyzed and discussed.