阴极电沉积法制备ZnO及其特性研究

Fabrication of ZnO films by cathodic electrodeposition and study of its characteristic

用ZnCl2的非水二甲基亚砜溶液做电解液,采用阴极电沉积法在导电玻璃上制备出了一系列的ZnO薄膜。实验发现ZnCl2的浓度对ZnO薄膜的光学性质有重要影响,ZnCl2浓度依次为0.01mol/L、0.03mol/L和0.05mol/L。当ZnCl2的浓度为0.01mol/L时薄膜的光学性能最好,此时发射谱出现紫峰和绿峰。XRD分析表明,薄膜是ZnO的多晶结构。

A series of ZnO films was prepared by cathodic electrodeposition on NESA glass substrate,and the dimethylsulfoxide(DMSO) solution,which contained ZnCl__2 but no water, was used as the electrolyte. In order to make a comparison, three kinds of concentration of ZnCl__2,0.01 mol/L,(0.03 mol/L) and 0.05 mol/L,were applied.It is found that the concentration of ZnCl__2 influences the characteristic of luminescence of the ZnO films. The characteristic of luminescence of the film was the best when the concentration of ZnCl__2 was 0.01 mol/L, and two peaks corresponding to the violet peak and the green peak appeared in the spectrum. The X-ray diffraction(XRD) spectrum shows that the film got is ZnO crystal.