基于机器微视觉的微结构平面运动测试技术

Measurement Technique of in-Plane Motion for Micro-Structure Based on Machine Micro-Vision

为了对MEMS的微结构平面运动特性参数进行提取和分析,基于机器微视觉构建MEMS动态测试系统,提出模糊图像合成技术.在连续光照明下获取微结构运动图像,利用光学检测方法增强模糊特征带,引入亚像素定位技术提取特征结构边缘,最终获得微结构的平面运动特性参数.实验结果表明,该系统测量误差小于100nm,具有较好的测量重复性精度.与现有系统相比,该系统测量原理简单,实现方便,且能满足微结构的测试需求.

Based on machine micro-vision,micro electro-mechanical system(MEMS) dynamic testing system was set up to measure dynamic parameters for micro-structure. Blur image synthesis technique was presented to extract and analyze in-plane motion characteristics of MEMS micro-structure. In the condition of continuous lighting, motion images of micro-structure were acquired. Using optical measuring method the blur belt was enhanced. Technique of subpixel location was introduced to extract edge of characteristics structure. The in-plane motion characteristics of MEMS were obtained at last. Experimental results indicated that the error of measurement is less then 100 nm and the precision of repetition measurment is high. The system has the advantages of easier measuring theory and more convenient realization compared with other testing system.