电镀高饱和磁感应(B_s)CoNiFe软磁薄膜研究

Study on the electrodeposition of high B_s soft magnetic CoNiFe films

研究了电沉积 CoNiFe 合金薄膜镀液中主盐离子浓度对膜层磁性能的影响。用振动样品磁强计(VSM)和四探针等方法测试分析了膜层的物理性能。结果表明膜层的物理性能与合金镀液中的主盐离子浓度密切相关,镀液中Ni2+、Fe2+、Co2+浓度分别为0.2、0.012和0.063mol/L时,电沉积的 CoNiFe合金膜层的电磁性能较佳。其饱和磁化强度 Bs 达 1.9T,矫顽力Hc 为91.5A/m,电阻率为45μΩ·cm,在 1MHz下磁导率μi 为602。

The effect of the bath composition on magnetic properties of the CoNiFe alloy films was studied. VSM and four-probe methods were utilized for the testing of electric and magnetic properties of the film. The results show that the magnetic properties of the film are closely related to the concentration of Ni2+, Fe2+, Co2+ in the plating bath, and the excellent electric-magnetic properties of the CoNiFe alloy film could be obtained at the optimized concentration of Ni2+ 0.2 mol/L, Fe2+ 0.012 mol/L and Co2+ 0.063 mol/L under the plating conditions of id 10 mA/cm2, pH value 2.8, temperature 25°C and film thickness 1.2 μ m, which possesses low Hc of 91.5 A/m and high Bs of 1.9 T, ρ of 45 μ Ω &middot cm and μi of 602 under the frequency of 1MHz.