金属栅网在电子能谱仪中的应用和分析

综述了金属栅网在电子能谱仪的减速透镜和分析器中的应用。正确地把金属栅网与单透镜结合起来，使减速透镜的设计大为简化，实现减速和加速，调节透镜的聚焦能力，缩短透镜与样品间的距离，提高透镜的接收和传输效率，球面金属栅网可增大透镜的接收角和补偿象差。此外金属栅网还可以屏蔽电场，避免电位渗透干扰分析器的工作。

The metal mesh used in retarding lenses and analyzer of electron spectrometer is summarized,Thedesign of retarding lenses can be simp1ified,when Enzel lenses is combined with the metal mesh. The metal mesh canbe used for accelerating or retarding the electron beam,increasing or decreasing the focus ability of the lens,rdeucingthe destance from the samp1e to top of the lens,and improving the transmission of lens;the spherical metal mesh canincrease the acceptance angle of lens and compensate the aberration. Morever the metal mesh can also be used to shieldthe electronic field and avoid disturbing for analyzer.