正压漏孔校准装置的研制

Development of Pressure Leak Calibration System

作者对正压漏孔校准方法作了研究 ,为了对不同示漏气体的正压漏孔进行精确校准 ,建立了一套改进型的PΔV/t漏孔校准装置 ,并对该装置进行了不确定度的分析。该装置校准范围 1× 10 -4Pam3 /s～ 1× 10 -7Pam3 /s ,在漏率 2× 10 -6Pam3 /s时系统总误差小于 4 0 %。

A novel technique has been successfully developed to accurately calibrate pressu re leak detectors independent of its filling gases.The uncertainty of the home-b uilt calibration instrument,the improvedPΔV/t system,was analyzed.The calib ration leak rate ranges from 1×10 -4 Pa m3/s to 1×10 -7 Pa m3/s. The overall systematic errors are below 4.0% at the rate of 2×10 -6 Pa m 3/s.