离子注入晶体X射线衍射的物理模型及理论研究

The theoretical study and the physical model of x-Ray diffraction after Implanting crascal with ion

这里通过原子、单位晶胞、一个原子平面、晶体薄片、晶体注入层对X射线的相干散射,建立物理模型,进行理论研究,得到反射振幅及反射强度表达式,从而根据实验可获得损伤层内的胁变分布等。

Through atom、unit cell、crystal flake、crystal injection X-Ray coherent scattering,this paper set up a physical model,make theoretical investigation,as result get the expression about amplitude and intensity of reflected wave,thus we can get the strain distribution of injury layer in crystal according to the conclusion of experimentation.