定容式流导法微流量校准装置

Low Throughput Calibration by Constant Volume and Conductance Technique

定容式流导法微流量校准装置是气体微流量的计量标准 ,可采用定容法和流导法对气体微流进行校准 ,校准范围为 (5× 10 -2 ～ 5× 10 -11)Pa·m3 /s,合成标准不确定度为 0 .5 6 %～ 1.7%。

A novel low throughput calibration,has been successfully developed,in which volume and conductance are kept constant.The calibration ranges (5×10 -2 ～5×10 -11 )Pa·m 3/s,with a combined standard uncertainty of 0.56%～1.7%.