摘要
用直流反应磁控溅射方法在玻璃基底上制备了Sb修饰TiO2 薄膜 ,利用XRD ,Raman光谱以及SIMS研究了Sb对其表面结晶情况的影响并用XPS及SIMS分析了薄膜的成分。结果表明一定程度Sb的修饰对TiO2 薄膜成晶有优化作用 ,起到了类似表面活性剂的作用 ,并使薄膜表面的光致亲水性能得到改善。当Sb修饰过量时 ,破坏了TiO2 原有的晶格结构 ,劣化了薄膜表面的光致亲水性。
Sb-doped TiO2 films, grown on glass substrates by DC reactive magnetron sputtering, were characterized with X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy and secondary ion mass spectroscopy (SIMS) to evaluate influence of Sb on film surface modification. The results show that an appropriate amount of Sb dopant, acting as a surfactant, may significantly improve its surface crystallization and its photo-induced surface hydrophilicity. However, too high a Sb concentration may inversely affect TiO2 crystal structure and the photo-induced surface hydrophilicity.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2005年第1期50-52,共3页
Chinese Journal of Vacuum Science and Technology
关键词
直流反应磁控溅射
TIO2薄膜
类似
二氧化钛薄膜
RAMAN光谱
表面
SIMS
XRD
XPS
劣化
Antimony
Chemical modification
Doping (additives)
Hydrophilicity
Magnetron sputtering
Raman spectroscopy
Secondary ion mass spectrometry
Semiconducting films
Surface active agents
Titanium dioxide
X ray diffraction analysis
X ray photoelectron spectroscopy
