摘要
X光电子能谱和硬度分析测试表明:利用MEVVA离子注入机在聚脂膜(PET)表面注入或沉积C,可形成类 金刚石(DLC)薄膜.根据C1sXPS谱可直接计算出DLC中sp3键所占比例.沉积法生长的DLC中sp3键所占比例明显 高于注入法.与衬底PET相比,表面薄膜硬度提高了1个量级,大大改善了PET的性质.对DLC膜中的碳氧化合物污染 进行了讨论.
Carbon ions are deposited on or implanted into PET polymer substrates by MEVVA ion source. XPS and hardness measurements illustrate that diamond-like carbon (DLC) films are fabricated on the PET. The sp 3 components of the DLC films are directly determined by the C1s XPS spectra. The sp 3 components in the deposited films are higher than those in the implanted films. The DLC films are over 10 times harder than PET substrate. The characters of coated PET with DLC are better than those of the original one. In addition, the carbon oxide compounds containments within the DLC films are discussed.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2005年第1期35-37,共3页
Journal of Beijing Normal University(Natural Science)
基金
国家自然科学基金资助项目(50141022)
关键词
类金刚石薄膜
聚脂膜
XPS
硬度
diamond-like carbon (DLC)
polymer PET
XPS
hardness
