扫描电镜用于人工蛋白石模板中填充InP的形貌研究

Morphology Research on InP-infiltrated Artificial Opal Template by SEM

扫描电子显微镜是对人工欧泊光子晶体进行形貌观察、研究的重要手段。本文利用扫描电子显微镜对人工欧泊晶体及其填充InP后的形貌进行了分析。结果发现,二氧化硅微球短程有序而在较大的区域则出现台阶、空位和失配等缺陷;在选定生长条件下,InP在SiO2 球空隙间具有较高的填充率和较好的结晶质量。此项研究为制备三维InP光子晶体提供了科学依据。

SEM is an important means for the observation and study of the artificial opal photonic crystal. Morphologies and structures of the artificial opal and InP-infiltrated artificial opal were researched by SEM in this paper. The results show that the sample surface presents a perfect short-range order. At long range, some defects in domains were observed such as steps, vacancies and dislocations. In the optimized growth conditions, InP was shown of the better infill ratios and high crystalline quality. The study provides a scientific basis for manufacturing InP three dimensional photonic crystal.