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(Pb_(1-x)Sr_x)TiO_3系薄膜铁电性能的工艺因素研究

TECHNOLOGY STUDY ON FERROELECTRIC PROPERTIES OF (Pb_(1-x)Sr_x)TiO_3 FILM
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摘要 钛酸锶铅((Pb1-xSrx)TiO3)薄膜是一种重要的铁电薄膜,应用潜力很大,是高新技术研究的前沿和热点之一。通过磁控溅射的方法制备了PST薄膜,详细研究了不同工艺因素对PST薄膜铁电性能的影响。结果表明,选择合适的工艺条件可以制备铁电性能优良的钙钛矿相PST薄膜。 (Pb_(1-x)Sr_(x))TiO_(3) (PST) film, as an important ferroelectric film, has become an extensively studied subject of much basic and technological interest. The PST ferroelectric films were fabricated by magnetron sputtering. The problems of technology connected with ferroelectric properties of PST films have been analysised particularly. The results showed that the PST thin films would possess the perovskite phase and excellent ferroelectric properties with proper technology.
作者 赵毅红 陈荣发 王茂祥
机构地区 扬州大学机械工程学院 江苏移动
出处 《真空与低温》 2004年第4期205-210,共6页 Vacuum and Cryogenics
基金 扬州大学科研基金资助(T0211066)。
关键词 工艺因素 铁电薄膜 制备 钙钛矿相 铁电性能 工艺条件 研究 前沿 磁控溅射 钛酸锶 (Pb_(1-x)Sr_(x))TiO_(3) magnetron sputtering technology
分类号 O484 [理学—固体物理] TQ174 [化学工程—陶瓷工业]
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真空与低温
2004年 第4期

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