摘要
针对特殊器件烘烤温度低于200℃的要求,分析了影响管内真空度的相关因素,进行了升温过程中烘烤温度对真空度影响的实验研究,取得了在约170℃时器件内材料放气量大、真空度相对最低等相关数据,依此确定了升温速率及烘烤工艺。
The baking temperature of a certain special device is in need of under 200-centdegree. The influence of baking temperature on degree of vacuum during heating up was experimental studied. Correlative influencing factors were analyzed. The results show that outgassing quantity of device is maximum and degree of vacuum is minimum at 170-centdegree, accordingly, the vacuum exhaust technological standards are determined.
出处
《真空与低温》
2004年第4期211-214,共4页
Vacuum and Cryogenics
