氮分压对氮化锆薄膜颜色影响规律的研究

STUDY ON COLOR INFLUENCING REGULATION OF NITROGEN PARTIAL PRESSURE ON ZIRCONIUM NITRIDE FILMS

采用QMS200质谱仪进行镀膜过程中的气氛监控,通过俄歇电子能谱分析了氮气分压与Zr N薄膜中氮含量的关系;通过Zr N薄膜颜色的测量得出了氮分压与薄膜颜色的关系。

The QMS200 Mass Spectrometer is taken to monitoring the gas in the process of filming. Auger electron spectroscopy is used to analyze the relation between the Nitrogen Partial Pressure and the Nitrogen content in the film. By measuring the Zr-N film, the relation between Nitrogen Partial Pressure and the color of the film is found.