CO_2激光加工PMMA微阵列点样芯片

CO_2-laser micromachining for production of PMMA-based microarrayer

提出利用CO2激光器快速制作微阵列点样芯片。通过测量激光在不同功率下加工小孔或是对同一小孔加工不同次数时所得小孔孔径和深度,以此来确定激光器的各项性能参数。并且测得不同功率的激光穿透小孔以及穿透次数不同所得小孔孔径。最后利用直径约为79μm的10×10阵列式孔道制作微阵列点样芯片,于尼龙膜上点样,所得样点平均直径为200μm,并测得小孔孔径与样点两者相对标准偏差分别为4.3%和7.4%。

A new method to produce microarrayer rapidly by CO_2-laser system was presented. The system parameter was assessed of the depth and diameter of laser-ablated hole on the laser beam power and on the number of marks of the beam in the same hole. And the diameters of penetrated holes on the laser beam power and on the number of marks of the beam in the same hole were measured. The microarrayer was produced by the 10×10 array of holes. The diameters of holes were about 79μm. The diameters of spots which were printed on nylon membrane were about 200μm. And the CV of holes and the spots were 4.3% and 7.4%