MOEMS阵列光开关的微反射镜的制作
被引量：2
Fabrication of reflective micromirror for MOEMS array optical switches
摘要
通过各向异性湿法腐蚀工艺利用(110)硅片制作了8×8阵列光开关的微反射镜阵列,反射镜面为{111}面,表面粗糙度低于10nm, 垂直度好于用同样的方法在(100)硅片上制作的反射镜.
出处
《高技术通讯》
CAS
CSCD
北大核心
2005年第3期53-55,共3页
Chinese High Technology Letters
基金
国家高技术研究发展计划(863计划)，教育部跨世纪优秀人才培养计划，吉林大学校科研和教改项目
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引证文献2
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1董玮,梁静秋,刘彩霞,张歆东,贾翠萍,周敬然,王立军,陈维友.体硅MOEMS阵列光开关的制作[J].半导体技术,2006,31(8):573-575. 被引量：2
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2贾翠萍,董玮,仲志成,周敬然,李元元,陈维友.阵列光开关驱动结构制作工艺的研究[J].半导体光电,2007,28(3):361-362.
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1具有高对比折射率的亚波长光栅反射镜面[J].现代化工,2007,27(6):70-71.
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2董玮,梁静秋,刘彩霞,张歆东,贾翠萍,周敬然,王立军,陈维友.体硅MOEMS阵列光开关的制作[J].半导体技术,2006,31(8):573-575. 被引量：2
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8贾翠萍,董玮,仲志成,周敬然,李元元,陈维友.阵列光开关驱动结构制作工艺的研究[J].半导体光电,2007,28(3):361-362.
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