生物芯片高效点样微悬臂梁探针的微细加工

Micro machining of Micro-cantilever Probes for Efficient Deposition for Biochip s

生物芯片技术是 90年代初发展起来的一门新兴技术 ,将给 2 1世纪生命科学和医学研究带来一场革命。其中生物芯片中的微阵列分析最为关键 ,尤其受到人们的关注和研究。微阵列形成主要由各种探针接触式点样而得的。微机电系统(MEMS)的兴起和发展为点样探针的制备提供了简单而有效的微细加工技术。介绍了基于MEMS技术的SiO2 基微悬臂梁探针的设计和制备 ,并用这种探针进行Cy3标记链亲和素点样。结果表明这种微悬臂梁探针可以点样 2～ 3μm的样点 ,并且一次取样可以点样至少 30 0 0个点 ,从而实现高价生物微阵列点样。

Biochip technology will bring a tremendous revolution to life science and medical research in 21 century. Microarray assays represent an essential tec hnical advance in biomedical research. Recently, the demand for microarray assay technology has spring up. Therefore, low cost and flexible techniques are neede d to meet specific requirements for increasingly integrated biochips. Also perfo rmance must be improved in terms of speed and sensitivity. To this end, promisin g approaches, mainly based on micro and nanotechnologies, have been developed. I n this paper, the design and microfabrication of a novel type of micro-cantilev e r probe are introduced. These probes were fabricated using silicon dioxide by Mi cro-electromechanical System (MEMS) techniques, and they featured one micron sp l it gap, microchannels and self-replenishing reservoirs. All fabricated micro-c an tilever probe were tested on Nanoarrayer TM instrumentation. Cy3-streptavi din was loaded as biological sample and patterned on DSU gold surface. Results showed t hese probes were capable of generating high quality biological arrays with routi ne spot sizes of 2-3 microns and could deposit at least three thousand spots wi t hout reloading. The spot size could potentially achieve sub-micron when probe s i ze was further shrunk down by the high-resolution lithography technique or more precise microfabrication technologies, such as E-beam lithography. To further i m prove sample loading efficiency, it is needed to modify the cantilever surface i n order to better confine sample inside the microchannel and reservoir, which wi ll be researched in the future.