摘要
综述了磁性薄膜微电感的研究现状,介绍了四种不同电感器件的结构设计(平面螺旋型,磁芯螺线管,曲折结构及夹心条状结构)及其优缺点和磁芯材料(坡莫合金,铁氧体,非晶,纳米晶软磁)对电感器件的影响。
Reviewed was the current status of the magnetic thin film microinductors. Four kinds of different microinductors, including their structure designs, merits and drawbacks were introduced. According to different design requirements and their applications, various core materials are selected to use in the fabrication of the microinductor. The effects of the core materials on microinductor are also discussed.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2005年第4期68-71,共4页
Electronic Components And Materials
基金
国家自然科学基金资助项目(50275096)
上海市纳米专项(0215nm104
0352nm014)
关键词
电子技术
磁性薄膜
综述
微电感
结构设计
磁芯材料
电感量
品质因子
electronic technology
magnetic thin film
review
microinductor
structure designs
magnetic core material
inductance value
quality factor
