2Anderson J,Bradley D,Chen D C C,et al.Advances in uncooled systems applications:infrared technology and application[J].Proc.SPIE,2003,5 074:0227-786X/03.
3Murphy D,Ray M,Raytheon,infrared operations(RIO):Infrared technology and applications[J].Proc.of SPIE,2003,4 820:0277/786X/03.
4.MEMS和微系统-设计与制造[M].北京:机械工业出版社,2004.225-228.
5WoodR A,Monolithic silicon microbolometer arrays[J].Semiconductors and Semimetals,47:50-51.
6Parrish W J,Woolaway J T.Improvements in Uncooled Systems Using Bias Equalization[M].Santa Barbara.Indigo Systems Corporation.