激发物激光烧蚀法制备铁电和压电薄膜

Ferroelectric and Piezoelectric Thin Films Prepared by Excimer Laser Ablation Method

本文叙述用激发物激光烧蚀法沉积几种铁电和压电薄膜的制备法和性能，并介绍了这些薄膜在微电子学器件和微波声学器件方面的应用。

This paper reviewed the fabrication and properties of several ferroelectric and piezoelectric thin films prepared by excimer laser ablation method. Furthermore,the applications of these thin films to the microelectronic devices and microwave acoustic devices are also presented.