摘要
本文报道了一种具有表面微机械结构的新型体声波复合谐振器。讨论了ＺｎＯ薄膜换能器的取向与体波模式机电耦合系数之间的关系；复合谐振器特性与器件参数的关系。给出了谐振器的制作工艺及测试结果。器件的尺寸为２５０μｍ×２５０μｍ，谐振频率在５５９．０５ＭＨｚ。
A new type of bulk acoustic wave(BAW)composite resonator with micromachining structure is reportedin this paper.The relationship between orietation of ZnO thin film and coupling coefficient of bulk wave mode is derived.The characterislic dependence of composite resonalor on device parameters is discussed.The measurement of the deviceshows that the resonant frequency of 559.05MHz with the size about 250μm×250μm.
出处
《压电与声光》
CSCD
北大核心
1994年第5期12-15,35,共5页
Piezoelectrics & Acoustooptics
关键词
体声波器件
压电薄膜
表面微机械
谐振器
bulk acouslic wave device,surface micromachining,piezoelectric thin film
