摘要
本文概述了以金属有机化合物为原料制备铁电薄膜的工艺过程、特点,以及最新研究进展;着重介绍了金属有机物化学气相沉积,金属有机物热分解,以及溶胶一凝胶三种制备技术在铁电薄膜制备领域中的应用。
The processes and characteristics as well as recent advances for fabricating ferro-electric thin films using metallorganic compounds as eaw materials are outlined in this paper.The applications of some methods such as MOD,MOCVD and Sol-Gel on preparation of ferroelectric films are emphasized.
出处
《压电与声光》
CSCD
北大核心
1994年第5期45-54,共10页
Piezoelectrics & Acoustooptics