用金属有机化合物制备铁电薄膜：工艺及进展

Preparation of Ferroelectric Films Using Metallorganic Compounds:Process and Progress

本文概述了以金属有机化合物为原料制备铁电薄膜的工艺过程、特点，以及最新研究进展；着重介绍了金属有机物化学气相沉积，金属有机物热分解，以及溶胶一凝胶三种制备技术在铁电薄膜制备领域中的应用。

The processes and characteristics as well as recent advances for fabricating ferro-electric thin films using metallorganic compounds as eaw materials are outlined in this paper.The applications of some methods such as MOD,MOCVD and Sol-Gel on preparation of ferroelectric films are emphasized.