摘要
A SINGLE-CRYSTAL SILICON SYMMETRICAL AND DECOUPLED GYROSCOPE ON INSULATING SUBSTRATE；ALMINIUM NITRIDE BASED THIN FILM BULK ACOUSTIC RESONATOR USING GERMANIUM SACRIFICIAL LAYER ETCHING； Alteration of Poisson's ratio in high coupling piezoelectrics；Capacitance coupling micromechanical filter；Coupled, macro-micro modeling for hot deformation and sintering……
