纳米检测轮廓仪相移干涉图处理

Phase-Shift Interferogram Processing of the Profilometry with Nanometer Resolution

研究了相移干涉轮廓仪干涉图处理的相位提取算法和相位去包裹算法.提出区分像素点的四步相位提取算法,该算法有效地消除了环境噪声,降低了相移误差的影响,同时具有广泛的实用性.为了验证该算法,首先检测一标准台阶面,测得台阶高度的平均测量误差为1.600;然后以插入光纤的光纤连接器端面的三维轮廓为对象进行了实际检测,测得光纤端面与连接器端面高度差平均值为45.7nm,平均测量误差为200.测得光纤端面上一污点高度为23.6nm,平均测量误差为300.

Phase extracting algorithm and phase unwrapping algorithm of interferogram processing based on phase shift interfering profilometry are discussed. A new algorithm called pixel divided 4-step algorithm is pre- sented. The new algorithm that is more applicable can reduce the influence of external noises and phase shift error. To prove the proposed algorithm, first, a standard step surface is measured, the average measurement error is 1.6 0 0, and then, measurement of profile of fiber connector surface with fiber inserted is taken. Average fiber protrusion value was measured to be 45.7 nm, the average measurement error was 2 0 0. Average height of a plot on fiber connection was measured to be 23.6 nm, the average measurement error was 3 0 0.