摘要
讨论了面对半导体产业的新形势,设备制造商应思考新问题和寻找新产品;并指出半导体设备的新发展趋势,如设备的模块化、软件化和多功能化。
In this paper, a new problem is pondered by the eauipment manufacturer, and recent dovelopment in semiconductor equipment are discussed.
出处
《电子工业专用设备》
2005年第4期17-19,共3页
Equipment for Electronic Products Manufacturing
关键词
半导体设备
模块化
软件化
多功能化
Semiconductor equipment
Mouldize
Softwareize
Multiple functionize
