摘要
压力传感器的时漂普遍存在,一直找不到有效的方法来解决.针对因参数退化引起的时漂,采用加速老化试验,得到了压力传感器的失效模式及失效比例.分析了输入/输出特性曲线形状及其随时间和温度的变化规律.提出一种用标准压力对传感器进行实时标定进而获得实时输入/输出特性的方法,标定的实现由程序控制.经验证对比,实时输入/输出特性达到很高的精确度.在0 ～ 45 kPa压力范围、 -10 ～ 45℃温度范围内,根据其计算的压力值与实际压力比较,最大偏差为 0.098 kPa, 最大相对误差0.92 %.
The time-drift of pressure sensors exists generally. However, effective methods to resolve it haven't been found. We mainly study the time-drift which has been caused by Parameter degeneration. By the accelerated aging test, failure model and failure proportion of pressure sensor have been obtained. The input/output characteristic curves and its change direction with time and temperature have been analysed. A method of establishing real-time input/output characteristic by normal pressures calibrating the characteristic curves is presented and the calibration process is controlled by software. We have demonstrated the accuracy of real-time input/output characteristic. The pressure which is derived from real-time input/output characteristic comparing with actual pressure, maximum measurement error is only 0.098 kPa and maximum relative error is 0.92 % within 0-45 kPa and-10-45°C.
出处
《电子器件》
EI
CAS
2005年第1期59-62,共4页
Chinese Journal of Electron Devices
关键词
压力传感器
时漂
输入/输出特性
参数退化
标定
pressure sensor
time-drift
input/output characteristic
parameter degeneration
calibration
