微机监控光学膜厚方法的实验研究

Experimental Research on Automatic Control of Optical Coating Thickness by Microcomputer

作者设计和制作了膜厚自动监控系统。利用该系统能准确控制λ/4膜层的极值厚度,其误差<3％。该方法快速、有效、成本低廉,易于推广应用。实验结果表明,研究方法是成功的。

The automatic control system of coating thickness, designed and deve loped in this paper, can accurately control the extreme thickness of quarter wavelength, the error of which is <3%. This method is rapid ,effective and inexpensive in costs,so it is easily popularized in wide applications. The experimental results show that it is successful in controlling coating thickness.