热氧化纳米Zn制备ZnO厚膜及其气敏特性的研究

The Thermal Oxidated Formation of ZnO Thick Film Using Nanometer Zn Particles and the Gas Sensing Properties

以激光 -感应复合加热法制备的纳米Zn为气敏基料 ,以蒸馏水为粘结剂 ,用空气电阻炉在 6 0 0℃氧化烧结 2h ,在Al2 O3 陶瓷管上制备了旁热式厚膜气敏元件。然后进行了XRD检测和SEM电镜观察 ,以静态配汽法作气敏性能的测试。结果表明 :ZnO形成了由纳米棒、纳米薄片组成的带空隙的厚膜 ,其颗粒形貌和膜结构能够承受气敏性能测试的温度冲击而保持稳定 ,对VOCs具有较好的气体敏感性。

Zn nanoparticales were produced by renovated hybrid induction and laser heating, conciliated by distilled water and coated on tubal fundus of Al_2O_3ceramic, then sintered and oxidated in air resistance furnace (600℃,2 h). The ZnO thick film was determinated by XRD and SEM for its composition and morphology. Gas sensitivity were measured using distribution in static state. It can be shown from experimental results. The microporous film is composed of nanometer poles and flakes with micropore of ZnO nanoparticals, they are steady because microscopic cracking is not found in the film and the micromechanism of ZnO nanoparticals is no change after the measure in different temperature。The film have a good gas sensing property for VOCs.