光学表面疵病的激光频谱分析法及其自动检测仪

Laser Frequency Spectrum Analysis Method and Automatic Inspection Instrument of Optical Surface Inperfection

光学零件表面疵病的自动检测长期以来一直是人们期待解决的问题。本文依据表面疵病的衍射性质，提出了一种有效的疵病自动检测方法─—激光频谱分析法，并以此为原理设计了测试仪器，获得了较好的实验测试结果。

Abstract The automatic inspection of surface imperfection of optical element is adurable problem expected to be solven,Based on the diffraction properties of surface imper-fection, an efficient method of automatic inspection of imperfection, laser frequency spec-trum analvsis methOd, is presented in this article. The Inspection instrument based on thismethod has been designed , and the resuIt of experiment was satisfactory.