摘要
用１０ｎｓ激光脉冲辐照Ｎ２气氛中的钛使表面氮化，对形成的氮化层进行激光烧蚀并用飞行时间质谱进行分析，结合发射光谱和表面形貌观察讨论了氮化机理。
Titanium surface is nitrided by irradiating with 10ns laser pulses in N2 atmosphere, the nitride layer is TOFMS analyzed by laser ablation, and together with observations of optical emission and surface morphology the nitride mechanism is discussed in the paper.
出处
《应用激光》
CSCD
北大核心
1994年第1期5-7,20,共4页
Applied Laser
关键词
激光氮化
飞行时间
质谱
钛合金
laser nitridation, laser ablation, time of fight mass spectra(TOFMS)
