宽范围挠性支承精密调焦系统的设计研究

STUDY AND DESIGN OF FLEXURE HINGE PRECISE POSITIONING SYSTEM HAVING RELATIVE WIDE RANGE

对宽范围挠性支承精密调焦系统进行了设计研究，给出了挠性支承的设计计算方法及公式，设计了两级杠杆放大式挠性支承机构及相应的驱动控制部分，试验证明，所研制的系统具有１８０μｍ的运动范围，系统分辨率优于０．５μｍ。还对电致伸缩微位移器在挠性支承机构中的驱动特性进行了试验研究。

In this paper,the design of the flexure hinge positioning system having arelative wide range is studied.The paper gives the calculation and formulas fordesigning the flexure hinge. The flexure hinge mechanism amplified by a two steplever is achieved. It is shown by experimental results that the resolution of theprecise positioning system is higher than 0.5μm and that the adjusting range is180μm,In addition,the paper also discusses the driving property of a piezo-electric actuator used in the flexure hinge machanism.