压 电 微 动 步 进 器

A PIEZOELECTRIC STEP MOTOR WITH SUBMICROMETER STEP SIZE

从理论和实验上研究了压电微动步进器的运动条件和运动速度，结果表明加在步进器上的电压变化率的临界值不仅限制了步进器的最大运动速度，也决定了步进器的运动条件，所设计的步进器简单、可靠，并采取屏蔽措施，降低了用磁噪声。

The operation condition and scanning velocity of a piezoelectric step motorhave been studied. It is found that the up and down slopes of the pulsed voltageapplied to the piezoelectric step motor not only limit the maximum velocity of thestepper, but also determine the operation condition. In our system,the mechanicaland electronie components of the stepper are compact and simple,and theelectromagnetic noise has been reduced by taking a shield shape.