准分子激光加工工艺参数优化

The Optimization of Excimer Laser Processing Parameters

本文采用准分子激光加工方法,选择不同的工艺参数对Al2O3 陶瓷材料试件进行加工,通过表面轮廓仪测量表面微观形貌,并计算其表面轮廓高度均方根值Rq.采用二次多项式拟合方法分析激光加工工艺参数对表面形貌的影响,即放大器电压、激光脉冲频率、激光扫描速度等工艺参数对表面轮廓高度均方根值Rq的影响进行拟合.结果表明,Rq值随着放大器电压、激光脉冲频率增大而增大,随激光扫描速度增大而减小,并且激光加工工艺参数对表面形貌的影响程度不同,由大到小依次为激光扫描速度、放大器电压、激光脉冲频率.并利用罚函数内点法寻优方法,在任意确定Rq条件下寻求工艺参数的最佳组合.因此,可以通过合理地选择工艺参数获得所需要的表面形貌,为表面微观形貌修饰提供了参考依据.

Excimer laser texturing was performed on the surfaces of Al_2O_3 ceramic under a group of processing parameters, in order to investigate the different processing parameters in relationships with the surface topography. The surface micro-topography was measured by a profilometer, and the statistical parameter (R_q) of surface topography was calculated. The relationship between surface topography parameters and processing parameters such as amplified volt, laser scanning frequency and laser scanning speed, was synthesized to two degrees multinomial equation. The equation shows that the surface parameter (root-mean-square roughness R_q ) will increase with the increasing of amplified volt, laser scanning frequency of processing parameters, and decrease with the increasing of laser scanning speed. The results indicate that they are laser scanning speed, amplified volt, and laser scanning frequency in turn according to the effect on surface topography parameters. The best processing parameters were optimized by the inner-punishing-function method. Accordingly, the designed surface topography can be obtained with the proper processing parameters, which is important to modify surface topography by Excimer laser.