动态电场诱导氧化实现纳米结构的加工

Nanofabrication of Nanostructure by Induced Oxidation in Dynamic Electrical Field

利用原子力显微镜 (AFM )进行表面的局部氧化加工是进行纳米结构加工的一种很有前途的方法。它具有广泛的应用范围 ,可以进行功能性纳米电子器件和纳米机械结构的加工。实验采用了动态电场作用下的AFM诱导氧化的方法 ,提高了氧化物的生长速度 ,并且改善了氧化结构的纵横比 ,能够更好地控制生成氧化物的结构和电属性。

Local oxidation nanofabrication by AFM is a promising method to produce nanostructure. It has a wide field of application. It can fabricate functional nanodevices and nanomechnical structures. The AFM induced oxidation process is realized in dynamic electrical field. It improves the rate of the oxidation growth and the aspect ratio of the nanostructures. Also it makes the control of the oxidation's structure and electrical property better.