摘要
将微直线电机宏动机构与双晶片压电悬梁微动机构结合,研制高精度、大范围的组合式微夹持器。针对宏微结合的结构形式,设计组合式微夹持器宏微控制系统。采用仿人智能PI控制方法,提高了控制精度。测试实验表明,闭环控制系统取得较好效果。
A combined micro-gripper with high resolution and large working space is developed which integrates the linear micro motor and bimorph cantilever structure. The control system is designed according to the integrated structure.An intellectual PI control algorithm was applied to the position control of the bimorph cantilever to obtain high performance. The test experiments show that the closed loop control model was effective.
出处
《压电与声光》
CSCD
北大核心
2005年第2期105-108,共4页
Piezoelectrics & Acoustooptics
基金
国家"八六三"MEMS重大专项资助项目(2002AA404450)
国防基础科研项目
关键词
微操作
微夹持器
双晶片压电悬梁
微直线电机
micromanipulation
micro-gripper
bimorph cantilever
linear micro motor
