摘要
利用压电陶瓷的逆压电效应,基于步进运动原理和误差补偿技术设计了一种高精度定位的大行程精密直线驱动器,制作了样机,进行了静态特性和幅频特性测试以及运动性能试验,给出了驱动器的移动速度与工作电压、频率之间的试验关系曲线。结果表明:在计算机闭环控制下,驱动器能稳定地实现双向运动,在行程1mm时,定位精度达±0.01μm,有效驱动力达13.5N。
Based on the converse piezoelectric effect?inchworm principle and error compensation method, a precise linear actuator by piezoelectric ceramic was presented. Through experiment, the actuator's static and amplitude-frequency characteristic and the relation of velocity with voltage and frequency was presented. Under the closing loop control of PC, the device can provide stable stepping movement with the stroke of 1mm, the positioning accuracy of ±0.01 μm and the force output of 13.5 N.
出处
《压电与声光》
CSCD
北大核心
2005年第2期136-138,共3页
Piezoelectrics & Acoustooptics
基金
国家"八六三"高技术研究发展计划基金资助项目(2202A423150)
关键词
驱动器
压电陶瓷
误差补偿
静态特性
幅频特性
actuator
piezoelectric cerimic
errorcompensation
static characteristic
amplitude-frequency characteristic
