压电陶瓷驱动并联微动机器人位姿测量与误差补偿

Pose Measurement and Error compensation of Piezoelectric Element Driven Parallel Microrobot

设计了一套针对六自由度微动并联机器人的位姿测量机构,并在压电陶瓷的开环与闭环控制状态下进行了位姿测量。实验证明,通过对压电陶瓷的闭环控制可消除压电陶瓷的迟滞与蠕变,系统定位误差明显减小。使用微位移循环修正法深入进行误差分析,确定初始误差,在此基础上,提出了误差补偿的方法,并验证了其可行性。

A machine used to measure the pose of 6-DOF piezoelectric element driven parallel microrobot is designed and used to measure the pose of piezoelectric element in the condition of open loop and closed loop, the results prove that the orientation error of system is reduced obviously by using piezoelectric element under closed loop, and the creep and hysteresis of piezoelectric element is eliminated. The method of adjust displacement recurrently is used to analyze the error deeply and confirm the incipient error. Based on the research, a method of error compensation is presented and proved reasonable.