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微混合器研究进展 被引量:7

Review of the Research on Micromixer
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摘要 微混合器作为微全分析系统重要的组成部分,是目前微机电系统(MEMS)领域内的研究热点。文章介绍了微混合器的设计要求与目标、加工方法与材料的选择、微混合的特点与混合机理。微混合器一般可分为主动混合器与被动混合器,基于此分类方法,文章综述了微混合器的国内外研究现状,并讨论了目前研究中存在的一些问题,展望了微混合器的研究前景。 As the key part of micro total analysis systems,micromixers are researched widely in the field of MEMS recently. The design goals,fabrication techniques and materials of micromixers and the mixing mechanism are introduced. Micromixers are mainly divided into passive mixers and active mixers. The research status of micromixers are summarized. Existing problems and future direction are also discussed.
出处 《微纳电子技术》 CAS 2005年第4期164-171,199,共9页 Micronanoelectronic Technology
基金 国家自然科学基金项目(50275079) 博士学科专项科研基金(20010288013)
关键词 微机电系统 微全分析系统 微混合器 主动混合器 被动混合器 MEMS micro total analysis systems micromixer active mixer passive mixer
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参考文献20

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二级参考文献41

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