阵列式脉象采集探头的设计

Probe Design of Arrayed Sphygmology Instrument

提出了一种用微机电系统技术(MEMS)应变传感器阵列探头客观细腻地采集人体脉象的新思路。探头采用直接腐蚀出电阻条的技术,具有工艺简单、成本低廉、电阻变化率高、工作可靠等优点。对设计进行了理论计算和优化,并用有限元分析软件ANSYS8.0进行了结构和电耦合场仿真,模拟悬臂梁端点位移对电阻变化的影响。当悬臂梁末端位移变化为50μm时,电阻变化率模拟结果为18.84%,与理论计算值19.67%符合得很好。

For acquiring more comprehensive information of pulse conditions,a probe of pulse symbol instrument designed by MEMS technology was presented. It utilizes the method of direct etching of silicon to form the resistor. The processes are simple and economical,and the change of resistor highly sensitive,with high reliability. The coupled-field analyses between the structural and electric fields are carried out by finite element analysis software ANSYS8.0. The change of resistor with the displacement of cantilever tip is simulated. When the tip of cantilever displaces 50 μm,the modulation result 18.84% is in good agreement with the calculation result 19.67%. It presents a new way to design and fabricate the sensor used for sphygmology.