补偿式光纤双法布里──珀罗微位移测量系统

A double Fabry-Perot system for measuring micro-displacement with compensatingoptic fibre

提出了一种能补偿环境影响的、插入光纤传光介质的新型微位移测量系统，介绍了其灵敏度的测量结果。由于采用并行双通道的结构，系统具有高准确度、抗干扰等特点。该系统适合于微位移（纳米级）测量，可用于检定其它高准确度位移传感器、几何量定位、微细加工表面轮廓测量以及转换成微位移量或光程差的其他物理量的测量。

A new inseted optic fibre system for measuring micro-displace-ment is presented.It can compensate effects of environment.It’s measuring sen-sitivity is explained.Because of it adopts a parallel double channel configuration,the system has high accuracy and interference-free. It is suitable to measure dis-placements on nm level and sensors of high accuracy.It can determine dimension and position of the workpiece. It also can measure surface profile formed by pre-cision machining and can transfer other measured physical quantity to micro-dis-placement or optical path difference.