摘要
设计制作了一种用形状记忆合金驱动的周期可变光栅。用硅微细加工技术制作一种类似弹簧结构的光栅,将光栅与形状记忆合金相连。通上电流,合金温度改变引起形变,因此可以拉伸光栅,并改变光栅周期。对合金的形变特性及光栅的衍射特性都作了测试。实验表明,光栅最大可被拉伸10%,衍射角变化为0 32mrad。
A period-variable grating actuated by a shape memory alloy (SMA) is designed and fabricated. A spring-like grating is made by Si microfabrication technology. The grating is connected with SMA which will change its shape when current is applied, so it can drag the grating and change the grating's period. The diffraction experiment of the grating indicates that 10% extension has been obtained, which will generate the change of diffraction.
出处
《微细加工技术》
EI
2005年第1期26-28,共3页
Microfabrication Technology
