摘要
采用射频溅射法制备了"纳米铁磁金属颗粒 半导体基体"Fe In2O3复合颗粒膜,研究了颗粒膜磁特性随晶格结构的变化规律。实验结果表明,通过真空退火处理可改变Fe In2O3复合颗粒膜中纳米Fe颗粒的尺寸大小;颗粒膜的比饱和磁化强度σs随Fe颗粒尺寸的减小而降低,矫顽力Hc随Fe颗粒尺寸的变化出现峰值,表现出磁性单畴颗粒的临界特性。
Nanometric ferromagnetic metal particles-semiconductor matrix Fe-In_2O_3 composite granular films are fabricated by the radio frequency sputtering. The laws of the magnetic properties of granular films varying with the lattice structure have been studied. The result shows that the dimension of the nanometer Fe particles in Fe-In_2O_3 granular films can be changed by annealing in vacuum. The specific saturation magnetization (σ_s) of the granular films decreases with the decrease of particle dimension. The peak occurs in the dependence of the coercivity (H_c) on Fe particles dimension, which displays the critical property of the magnetic single domain particle.
出处
《微细加工技术》
2005年第1期54-57,共4页
Microfabrication Technology
基金
国家自然科学基金资助项目(59981004)
关键词
复合颗粒膜
晶格结构
磁特性
单畴颗粒
composite granular film
lattice structure
magnetic property
single domain particle
