摘要
本文介绍了一种光纤探针式表面粗糙度测量仪,它集现有接触式和非接触式表面粗糙度测量仪优点 于一身,能满足表面粗糙度测量的高精度要求.本文阐述了此种测量仪的工作原理,说明了各部分的主要功能, 并给出了光纤探头部分的具体设计,最后分析了实验结果.
This paper introduces a kind of instrument for measurement of surface roughness by fiber probe. It gathers the strongpoint of contact and non-contract instruments for measurement of surface roughness by fiber probe now. It also satisfies the high-precision demand for measurement of surface roughness. This paper expatiates the working principle of this kind of instrument, explains the main function of each part and the concrete design of fiber probe. In the end, it analyzes the result of this experiment.
出处
《南开大学学报（自然科学版）》
CAS
CSCD
北大核心
2005年第1期49-52,共4页
Acta Scientiarum Naturalium Universitatis Nankaiensis
基金
天津市重点自然基金国际合作项目资助(033800211)
