摘要
DLTS和CV测试相结合可以对半导体的表面、界面性能及深能级杂质进行定量研究.本文主要介绍DLTS测试方法及微机化DLTS-CV组合测试系统的软、硬件设计.
The microcomputerized semiconductor apparatus with combination of DLTS-CVmeasurement become a effective, accurate and fast analyses tool which used for study surface state, interface state and deep traps in semiconductor material The paper refer to references of foreign country, introduces mainly the design of hardware and software configuration for microcomputer based apparatus.
出处
《微电子学与计算机》
CSCD
北大核心
1989年第2期8-12,共5页
Microelectronics & Computer
