摘要
本文简述了常规钝化方式,讨论了液相钝化和PECVD氮化硅钝化的原理、工艺及其在台面大功率管表面钝化中的应用。
Two passivaion processes, Liquid-phase passivation and PECVD SiN Passivation were discussed in this paper, both of them were used on power transister.
出处
《微电子学与计算机》
CSCD
北大核心
1989年第6期27-28,共2页
Microelectronics & Computer
