摘要
综述近年来一些先进国家利用真空微电子技术开展场发射平板显示器件研究的情况。概述这类器件的结构、工作原理、制作工艺、性能特点与发展水平，市场竞争与预测。
Research and development of field emission flat panel display based on technology of vacuum microelectronics are reviewed and structure, operation principle, manufacturetechnology, performance, development level, market competition and prediction on this kind ofdevice are discussed in this paper.
出处
《真空电子技术》
北大核心
1994年第2期10-15,共6页
Vacuum Electronics
关键词
真空微电子学
平板显示器
发射阴极
Vacuum microelectronics, Field emission cathode array, Flatpanel display, Matrix addressing
