磁控溅射沉积MCrAlY涂层技术研究

STUDY ON THE TECHNOLOGY OF MAGNETRON SPUTTERING DEPOSITION (MSD) MCrA1Y COATING

MCrA1Y（M=Fe，Ni，Co等）涂层是一种合金包覆涂层，用于防止燃气轮机涡轮部件的氧化和腐蚀。已经大规模用于沉积MCrA1Y涂层的技术有电子束物理气相沉积（EBPVD）、三极溅射、低压等离子喷涂（LPP）等。在一台专用装置上对磁控溅射沉积（MSD）MCrA1Y涂层进行了研究。结果表明MSDMCrA1Y涂层成分容易调整控制，涂层纯度高，涂层致密性和涂层厚度均匀性问题都比较容易解决；这些都比EBPVD或LPPS好。MSD的MCrA1Y涂层表面粗糙度远比LPPSMCrA1Y低。MSD的主要缺点是沉积速率低，但设备结构比较简单，制造工业规模的生产装置比较容易，可以弥补这个缺点。

MCrA1Y(M = Fe,Ni,Co or Ni+Co) coating is used to prevent the turbine parts of superalloys from oxidetion and hot corrosion. To apply these coatings in large scale, we have used the technologies of electron beam physical vapor deposition(EB PVD), of triod sputtering,and of lower pressure plasma spraying(LPPS). The technology of MSD MCrA1Y coating has been studied with a special unit. The results show that MSD MCrA1Y compeition can be easily controlled with high purity,and its density and uniformity are better than the one preperet by EB PVD or LPPS.Surface roughness of the MSD MCrA1Y coating is far lower than the one of LPPS.The drawhack to the MSD MCrA1Y coating technology is that the depeition rate is low. However,the unit is simple in structure,and the unit in industry-scale can be manufactured easily.