摘要
本文叙述了锆铝泵工作特性的四极质谱分析，以及值得讨论及改进的问题。
In this paper the quadrupole mass spectrographic analysis of the operation characteristics of Zr-Al pump is described and some questions which deserve to study and improve.
出处
《真空》
CAS
北大核心
1994年第1期20-24,共5页
Vacuum
