磁控溅射制备超导量子结

Preparation of Superconducting Quantum Junction with Magnetron Sputtering

本文介绍了用磁控溅射技术制备超导量子结的工艺，对其电学特性进行了测试，分析了影响超导量子结电学特性的各种因素。

Abstract The procedure of preparing superconducting quantum junction with magnetron sputtering is described here,measure its electronic properties and the various reasons which affeet the electronic properties are analyzed as well.