多弧离子镀中真空等离子体静电探针诊断方法的研究

Study on Electric Probe Diagnoses of Vacuum Plasma in Multi-Arc Ion Plating

多弧离子镀中的等离子体是由辉光等离体和弧光等离子体迭加而成的。本文主要叙述了这种等离子体诊断方法和对用静电探针诊断这种等离子体的研究成果。这套等离子体诊断系统性能稳定，是目前国内外用于诊断多弧离子镀中等离子体的首套系统。用它诊断出的等离子体参数是首次对这种等离子体的数量描述。等离子体参数为；在真空度为２．６７Ｐａ～１０．６Ｐａ，放电电流为５０Ａ～８０Ａ，工件偏压为０～—２ｋＶ的条件下，等离子体密度在１．３×１０１５ｍ－３～２．３×１０１５ｍ－３范围内，电子温度在４３０至６６０ｅＶ范围内，空间电位相对于阳极为正，且在２伏至３伏范围内。

Abstract Plasmas in Multi-Arc Ion Plating(MAIP) are made up of glow and arc plasma.The paper mainly discribes the sort of plasma diagnostic method and its results by electric probe diagnoses.The plasma diagnostic system is stable in property and the first one used in plasmas diagnoses in MAIP.The plasmas parameter diagnosed is first discribed in quantity which is as follows:plasma density 1.3×10 15m-3～2.3×10 15m-3,electron temperature 430～660eV,vacuum potencial being positive opposed to anode and 2～3 Volts,at the condition of vacuum degree 2.67～10.6Pa,discharge current 50～80A,negative bias 0～-2kV.